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Company · founded 1995

Axcelis Technologies (United States)

Beverly, United States · axcelis.com

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Citations, last 5 years: 17
Works, last 5 years: 31
h-index: 24
Scientists listed: 8
Grants since 2016: 0

Strongest research topics

Semiconductor materials and devices223Engineering
Ion-surface interactions and analysis197Engineering
Semiconductor materials and interfaces112Physics and Astronomy
Particle accelerators and beam dynamics75Engineering
Advancements in Semiconductor Devices and Circuit Design57Engineering
Advancements in Photolithography Techniques56Engineering

Most cited scientists, last five years

Mario NegriAxcelis Technologies (United States) · United StatesEngineering67citations, 5 yrs3works, 5 yrs15h-index Hank ChenAxcelis Technologies (United States) · United StatesMathematics18citations, 5 yrs17works, 5 yrs11h-index Fulvio MazzamutoAxcelis Technologies (United States) · United StatesEngineering17citations, 5 yrs8works, 5 yrs16h-index Asad AneesAxcelis Technologies (United States) · United StatesEngineering7citations, 5 yrs3works, 5 yrs5h-index L. RubinAxcelis Technologies (United States) · United StatesEngineering7citations, 5 yrs7works, 5 yrs13h-index Serguei KondratenkoAxcelis Technologies (United States) · United StatesEngineering6citations, 5 yrs3works, 5 yrs3h-index Wilhelm PlatowAxcelis Technologies (United States) · United StatesEngineering5citations, 5 yrs8works, 5 yrs1h-index Bo H. VanderbergAxcelis Technologies (United States) · United StatesEngineering0citations, 5 yrs3works, 5 yrs5h-index