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Company · founded 1966

Entegris (United States)

Billerica, United States · entegris.com

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Citations, last 5 years: 46
Works, last 5 years: 49
h-index: 39
Scientists listed: 1
Grants since 2016: 0

Strongest research topics

Advancements in Photolithography Techniques68Engineering
Semiconductor materials and devices66Engineering
Membrane Separation Technologies35Environmental Science
Advanced Surface Polishing Techniques24Engineering
Surface Modification and Superhydrophobicity23Materials Science
Advanced Materials and Semiconductor Technologies23Materials Science

Most cited scientists, last five years

David M. ErmertEntegris (United States) · United StatesChemistry4citations, 5 yrs8works, 5 yrs7h-index