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Company · founded 1980

Lam Research (Austria)

Villach, Austria · lamresearch.com

Part of Lam Research (United States)

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Citations, last 5 years: 22
Works, last 5 years: 17
h-index: 23
Scientists listed: 1
Grants since 2016: 0

Strongest research topics

Semiconductor materials and devices34Engineering
Plasma Diagnostics and Applications24Engineering
Advancements in Photolithography Techniques23Engineering
Copper Interconnects and Reliability16Materials Science
Advanced Surface Polishing Techniques9Engineering
Electrodeposition and Electroless Coatings7Engineering

Most cited scientists, last five years

Alexander X. ChenLam Research (Austria) · AustriaEngineering457citations, 5 yrs18works, 5 yrs11h-index