Skip to content

Research facility · founded 2001

Laboratoire des Technologies de la Microélectronique

Grenoble, France · ltm.univ-grenoble-alpes.fr

Part of Centre National de la Recherche Scientifique

Manage this page

Citations, last 5 years: 364
Works, last 5 years: 319
h-index: 80
Scientists listed: 0
Grants since 2016: 8

Strongest research topics

Semiconductor materials and devices763Engineering
Plasma Diagnostics and Applications608Engineering
Advancements in Photolithography Techniques564Engineering
Nanofabrication and Lithography Techniques409Engineering
Nanowire Synthesis and Applications324Engineering
Copper Interconnects and Reliability297Materials Science