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Company · founded 1997

KLA (Ireland)

Dublin, Ireland · kla-tencor.com

Part of KLA (United States)

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Citations, last 5 years: 0
Works, last 5 years: 1
h-index: 14
Scientists listed: 0
Grants since 2016: 0

Strongest research topics

Semiconductor materials and devices11Engineering
Advancements in Photolithography Techniques10Engineering
Industrial Vision Systems and Defect Detection6Engineering
Optical measurement and interference techniques5Computer Science
Semiconductor materials and interfaces4Physics and Astronomy
Advanced Measurement and Metrology Techniques3Engineering