S(Company · founded 1937STEAG (Germany)Essen, Germany · steag.comFollowManage this pageCitations, last 5 years106Works, last 5 years11h-index22Scientists listed0Grants since 20161OverviewPeople 0Grants 1Departments 0Strongest research topicsSemiconductor materials and devices48EngineeringAdvancements in Photolithography Techniques32EngineeringSemiconductor materials and interfaces26Physics and AstronomyAdvanced optical system design16EngineeringNanofabrication and Lithography Techniques13EngineeringAdvanced Power Generation Technologies12Engineering