A(CompanyAnelva Corporation (Japan)Asao Ku, Japan · anelva.canonFollowManage this pageCitations, last 5 years39Works, last 5 years16h-index66Scientists listed0Grants since 20160OverviewPeople 0Grants 0Departments 0Strongest research topicsSemiconductor materials and devices137EngineeringPlasma Diagnostics and Applications117EngineeringMagnetic properties of thin films75Physics and AstronomySemiconductor materials and interfaces65Physics and AstronomyCopper Interconnects and Reliability64Materials ScienceAdvanced Materials and Semiconductor Technologies49Materials Science