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Research facility · founded 1996

National Key Laboratory of Science and Technology on Micro/Nano Fabrication

Beijing, China · eecs.pku.edu.cn/xxkxjsxy/info/1303/5137.htm

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Citations, last 5 years: 6 389
Works, last 5 years: 545
h-index: 157
Scientists listed: 1
Grants since 2016: 0

Strongest research topics

Advanced MEMS and NEMS Technologies468Engineering
Advanced Sensor and Energy Harvesting Materials200Engineering
Microfluidic and Capillary Electrophoresis Applications154Engineering
3D IC and TSV technologies141Engineering
Metamaterials and Metasurfaces Applications117Materials Science
Inertial Sensor and Navigation112Engineering

Most cited scientists, last five years

Wengang WuNational Key Laboratory of Science and Technology on Micro/Nano Fabrication · ChinaMaterials Science32citations, 5 yrs11works, 5 yrs7h-index