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Company · founded 1987

Tokyo Electron Kyushu Ltd (Japan)

Kōshi, Japan · tel.com/about/locations/tkl.html

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Citations, last 5 years: 369
Works, last 5 years: 99
h-index: 25
Scientists listed: 4
Grants since 2016: 0

Strongest research topics

Advancements in Photolithography Techniques299Engineering
Nanofabrication and Lithography Techniques180Engineering
Block Copolymer Self-Assembly106Materials Science
Advanced optical system design67Engineering
Industrial Vision Systems and Defect Detection56Engineering
Semiconductor materials and devices45Engineering

Most cited scientists, last five years

Yoshihiro KondoTokyo Electron Kyushu Ltd (Japan) · JapanEngineering63citations, 5 yrs15works, 5 yrs18h-index Kayoko ChoTokyo Electron Kyushu Ltd (Japan) · JapanEngineering24citations, 5 yrs22works, 5 yrs3h-index Y. TaniguchiTokyo Electron Kyushu Ltd (Japan) · JapanEngineering21citations, 5 yrs3works, 5 yrs15h-index Hikari TomoriTokyo Electron Kyushu Ltd (Japan) · JapanMaterials Science10citations, 5 yrs11works, 5 yrs5h-index