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Company · founded 1983

Tokyo Electron Technology Solutions Limited (Japan)

Nirasaki, Japan · tel.com/about/locations/tyl.html

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Citations, last 5 years: 698
Works, last 5 years: 75
h-index: 16
Scientists listed: 5
Grants since 2016: 0

Strongest research topics

Semiconductor materials and devices52Engineering
Plasma Diagnostics and Applications40Engineering
Copper Interconnects and Reliability32Materials Science
Astrophysical Phenomena and Observations16Physics and Astronomy
Plasma Applications and Diagnostics15Medicine
Advancements in Photolithography Techniques13Engineering

Most cited scientists, last five years

Fumie TazakiTokyo Electron Technology Solutions Limited (Japan) · JapanPhysics and Astronomy5 668citations, 5 yrs49works, 5 yrs37h-index Zeyuan NiTokyo Electron Technology Solutions Limited (Japan) · JapanMaterials Science25citations, 5 yrs9works, 5 yrs18h-index Takashi MatsumotoTokyo Electron Technology Solutions Limited (Japan) · JapanDentistry17citations, 5 yrs10works, 5 yrs10h-index Toshiyuki SameshimaTokyo Electron Technology Solutions Limited (Japan) · JapanEngineering15citations, 5 yrs8works, 5 yrs30h-index Takeo NakanoTokyo Electron Technology Solutions Limited (Japan) · JapanEngineering0citations, 5 yrs6works, 5 yrs8h-index