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Scientist · Engineering

Dmitriy V. Likhachev

GlobalFoundries (Germany), Dresden, Germany

iD0000-0002-9842-528X

Citations, last 5 years: 18
Works, last 5 years: 6
h-index: 9
Citations, all time: 261
In Engineering: #592,060

Research topics

Optical Polarization and Ellipsometry25Engineering
Spectroscopy and Chemometric Analyses12Chemistry
Advancements in Photolithography Techniques10Engineering
Surface Roughness and Optical Measurements9Engineering
Electron and X-Ray Spectroscopy Techniques7Materials Science

Recent works

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