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Scientist · Engineering

Mitsuhiro Omura

KIOXIA Corporation (Japan), Tokyo, Japan

iD0009-0005-1786-7342

Citations, last 5 years: 202
Works, last 5 years: 3
h-index: 10
Citations, all time: 514
In Engineering: #151,066

Research topics

Plasma Diagnostics and Applications19Engineering
Advancements in Photolithography Techniques18Engineering
Semiconductor materials and devices10Engineering
Copper Interconnects and Reliability8Materials Science
Block Copolymer Self-Assembly6Materials Science

Recent works

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