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Scientist · Engineering

Hiroyuki Fukumizu

KIOXIA Corporation (Japan), Tokyo, Japan

iD0009-0006-9077-8538

Citations, last 5 years: 59
Works, last 5 years: 14
h-index: 8
Citations, all time: 166
In Engineering: #367,378

Research topics

Plasma Diagnostics and Applications21Engineering
Semiconductor materials and devices10Engineering
Vacuum and Plasma Arcs10Physics and Astronomy
Advancements in Photolithography Techniques7Engineering
Copper Interconnects and Reliability6Materials Science

Recent works

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