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Scientist · Engineering

Toshiyuki Tabata

Laser Systems & Solutions of Europe (France), Gennevilliers, France

iD0000-0003-4923-5663

Citations, last 5 years: 60
Works, last 5 years: 14
h-index: 16
Citations, all time: 1 187
In Engineering: #363,968

Research topics

Semiconductor materials and devices77Engineering
Semiconductor materials and interfaces73Physics and Astronomy
Advancements in Semiconductor Devices and Circuit Design29Engineering
3D IC and TSV technologies15Engineering
Copper Interconnects and Reliability15Materials Science

Recent works

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