U(Company · founded 1982Ulvac-Phi (Japan)Chigasaki, Japan · ulvac-phi.com/enFollowManage this pageCitations, last 5 years178Works, last 5 years32h-index40Scientists listed5Grants since 20160OverviewPeople 5Grants 0Departments 0Grants receivedNo grants recorded in open data since 2016.