- Citations, last 5 years
- 3
- Works, last 5 years
- 2
- h-index
- 25
- Scientists listed
- 0
- Grants since 2016
- 0
Departments and units
- ASM International (Belgium) Company
- ASM International (Finland) Company
- ASML (Netherlands) Company
Science Official PapersResearch shared and reviewed in the open