M(Company · founded 1988Mattson Technology (Germany)Dornstadt, Germany · mattson.comFollowManage this pageCitations, last 5 years7Works, last 5 years4h-index9Scientists listed0Grants since 20160OverviewPeople 0Grants 0Departments 0Strongest research topicsSemiconductor materials and devices24EngineeringSemiconductor materials and interfaces20Physics and AstronomySilicon and Solar Cell Technologies7EngineeringIon-surface interactions and analysis7EngineeringAdvancements in Semiconductor Devices and Circuit Design6EngineeringRadiative Heat Transfer Studies6Engineering