- Citations, last 5 years
- 152
- Works, last 5 years
- 39
- h-index
- 29
- Scientists listed
- 4
- Grants since 2016
- 0
Departments and units
- Electro Scientific Industries (United States) Company
- MKS Instruments (Germany) Company
- MKS Instruments (Japan) Company
Science Official PapersResearch shared and reviewed in the open