CSCompany · founded 2000Cabot Microelectronics (United States)Aurora, United States · cabotcmp.comFollowManage this pageCitations, last 5 years15Works, last 5 years1h-index40Scientists listed0Grants since 20160OverviewPeople 0Grants 0Departments 0Strongest research topicsAdvanced Surface Polishing Techniques111EngineeringAdvanced machining processes and optimization65EngineeringSurface Roughness and Optical Measurements36EngineeringErosion and Abrasive Machining34Environmental ScienceLaser Material Processing Techniques10EngineeringGyrotron and Vacuum Electronics Research10Physics and Astronomy