U(Company · founded 1964Ushio (Germany)Steinhöring, Germany · ushio.eu/dePart of Ushio (Japan)FollowManage this pageCitations, last 5 years7Works, last 5 years6h-index7Scientists listed1Grants since 20161OverviewPeople 1Grants 1Departments 0Strongest research topicsAdvancements in Photolithography Techniques10EngineeringPulsed Power Technology Applications7EngineeringPlasma Diagnostics and Applications5EngineeringVacuum and Plasma Arcs3Physics and AstronomyLaser-Plasma Interactions and Diagnostics1Physics and AstronomySemiconductor materials and devices1EngineeringMost cited scientists, last five yearsYTYusuke TeramotoUshio (Germany) · GermanyEngineering7citations, 5 yrs11works, 5 yrs7h-index