M(Company · founded 1964Mikron (Russia)Zelenograd, Russia · mikron.ru/enFollowManage this pageCitations, last 5 years8Works, last 5 years15h-index16Scientists listed0Grants since 20160OverviewPeople 0Grants 0Departments 0Strongest research topicsSemiconductor materials and devices26EngineeringSemiconductor materials and interfaces16Physics and AstronomyPlasma Diagnostics and Applications12EngineeringSilicon Carbide Semiconductor Technologies11EngineeringAdvancements in Semiconductor Devices and Circuit Design7EngineeringAdvancements in Photolithography Techniques7Engineering