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Company · founded 1961

MKS Instruments (Japan)

Tokyo, Japan · mksinst.com/intl/jp1.aspx

Part of MKS Instruments (United States)

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Citations, last 5 years: 10
Works, last 5 years: 5
h-index: 4
Scientists listed: 0
Grants since 2016: 0

Strongest research topics

Semiconductor materials and devices2Engineering
Copper Interconnects and Reliability2Materials Science
Semiconductor materials and interfaces2Physics and Astronomy
Adaptive Control of Nonlinear Systems1Engineering
Stability and Control of Uncertain Systems1Engineering
Atmospheric chemistry and aerosols1Earth and Planetary Sciences