Skip to content

Company · founded 2002

Shanghai Micro Electronics Equipment (China)

Shanghai, China · smee.com.cn/eis.pub?service=homepageService&method=selectlang&setlang=EN&showform=portal/index_en.ftl

Manage this page

Citations, last 5 years: 123
Works, last 5 years: 35
h-index: 14
Scientists listed: 2
Grants since 2016: 0

Strongest research topics

Advancements in Photolithography Techniques56Engineering
Advanced optical system design38Engineering
Optical measurement and interference techniques33Computer Science
Industrial Vision Systems and Defect Detection15Engineering
Advanced Measurement and Metrology Techniques14Engineering
Silicon Carbide Semiconductor Technologies9Engineering

Most cited scientists, last five years

Ziyang FengShanghai Micro Electronics Equipment (China) · ChinaEngineering6citations, 5 yrs5works, 5 yrs1h-index Wenkai YueShanghai Micro Electronics Equipment (China) · ChinaEngineering0citations, 5 yrs4works, 5 yrs0h-index