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Scientist · Engineering

Yoshinobu Ohya

Tokyo Electron (Japan), Tokyo, Japan

iD0009-0008-5955-5592

Citations, last 5 years: 235
Works, last 5 years: 3
h-index: 8
Citations, all time: 317
In Engineering: #131,212

Research topics

Plasma Diagnostics and Applications14Engineering
Plasma Applications and Diagnostics8Medicine
Vacuum and Plasma Arcs6Physics and Astronomy
Semiconductor materials and devices3Engineering
Dust and Plasma Wave Phenomena3Physics and Astronomy

Recent works

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