- Citations, last 5 years
- 1 037
- Works, last 5 years
- 224
- h-index
- 55
- Scientists listed
- 46
- Grants since 2016
- 1
Strongest research topics
Most cited scientists, last five years
Xiang LiuTokyo Electron (Japan) · JapanEngineering424citations, 5 yrs42works, 5 yrs41h-indexPeter L. G. VentzekTokyo Electron (Japan) · JapanEngineering345citations, 5 yrs37works, 5 yrs28h-indexHu LiTokyo Electron (Japan) · JapanEngineering250citations, 5 yrs11works, 5 yrs15h-indexYoshinobu OhyaTokyo Electron (Japan) · JapanEngineering235citations, 5 yrs3works, 5 yrs8h-indexYoungseok LeeTokyo Electron (Japan) · JapanEngineering231citations, 5 yrs30works, 5 yrs12h-indexKandabara TapilyTokyo Electron (Japan) · JapanEngineering214citations, 5 yrs40works, 5 yrs21h-indexXiang LiuTokyo Electron (Japan) · JapanEngineering202citations, 5 yrs42works, 5 yrs22h-indexYoungkwan LeeTokyo Electron (Japan) · JapanEngineering201citations, 5 yrs20works, 5 yrs51h-index