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Scientist · Engineering

Peter L. G. Ventzek

Tokyo Electron (Japan), Tokyo, Japan

iD0000-0003-0141-2843

Citations, last 5 years: 345
Works, last 5 years: 37
h-index: 28
Citations, all time: 2 604
In Engineering: #88,055

Research topics

Plasma Diagnostics and Applications185Engineering
Vacuum and Plasma Arcs91Physics and Astronomy
Plasma Applications and Diagnostics63Medicine
Semiconductor materials and devices54Engineering
Advancements in Photolithography Techniques46Engineering

Recent works

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