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Scientist · Materials Science

Tomoko Ito

Tokyo Electron (Japan), Tokyo, Japan

iD0000-0002-3482-4046

Citations, last 5 years: 158
Works, last 5 years: 26
h-index: 29
Citations, all time: 2 648
In Materials Science: #72,168

Research topics

Diamond and Carbon-based Materials Research65Materials Science
Plasma Diagnostics and Applications37Engineering
Ion-surface interactions and analysis36Engineering
Semiconductor materials and devices34Engineering
Semiconductor materials and interfaces23Physics and Astronomy

Recent works

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