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Scientist · Engineering

Richard A. Gottscho

Lam Research (United States), Fremont, United States

iD0000-0001-7484-5223

Citations, last 5 years: 333
Works, last 5 years: 4
h-index: 44
Citations, all time: 6 815
In Engineering: #91,562

Research topics

Plasma Diagnostics and Applications120Engineering
Plasma Applications and Diagnostics54Medicine
Semiconductor materials and devices50Engineering
Vacuum and Plasma Arcs46Physics and Astronomy
Advancements in Photolithography Techniques36Engineering

Recent works

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