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Scientist · Engineering

Hironori Moki

Tokyo Electron (Japan), Tokyo, Japan

iD0009-0006-6476-3359

Citations, last 5 years: 7
Works, last 5 years: 4
h-index: 2
Citations, all time: 21
In Engineering: #719,625

Research topics

Plasma Diagnostics and Applications3Engineering
Advanced Materials and Semiconductor Technologies3Materials Science
Semiconductor materials and devices2Engineering
Copper Interconnects and Reliability2Materials Science
Machine Fault Diagnosis Techniques1Engineering

Recent works

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