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Scientist · Engineering

Shyam Sridhar

Tokyo Electron (Japan), Tokyo, Japan

iD0000-0003-0342-4282

Citations, last 5 years: 18
Works, last 5 years: 11
h-index: 8
Citations, all time: 187
In Engineering: #592,060

Research topics

Plasma Diagnostics and Applications22Engineering
Plasma Applications and Diagnostics12Medicine
Semiconductor materials and devices11Engineering
Advancements in Photolithography Techniques11Engineering
Vacuum and Plasma Arcs8Physics and Astronomy

Recent works

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