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Scientist · Engineering

Toshihiko Iwao

Tokyo Electron (Japan), Tokyo, Japan

iD0000-0002-1672-6872

Citations, last 5 years: 13
Works, last 5 years: 4
h-index: 4
Citations, all time: 52
In Engineering: #642,852

Research topics

Plasma Diagnostics and Applications13Engineering
Semiconductor materials and devices8Engineering
Copper Interconnects and Reliability7Materials Science
Vacuum and Plasma Arcs5Physics and Astronomy
Plasma Applications and Diagnostics4Medicine

Recent works

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